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1

Characterization of Adhesion Force in MEMS at High Temperature Using Thermally Actuated Microstructures

Shavezipur, M., Gou, Wenjuan, Carraro, Carlo, Maboudian, Roya

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 926 KB

english, 2012

2

Charging and discharging behavior in dielectric-coated MEMS electrodes probed by Kelvin probe force microscopy

Laboriante, Ian, Farrokhzad, Nassim, Fisch, Maxwell, Shavezipur, Mohammad, Carraro, Carlo, Maboudian, Roya, Bai, Qing, Liu, Maozi, Hoen, Storrs

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 492 KB

english, 2012

3

Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays

Shavezipur, Mohammad, Harrison, Kimberly, Lee, William Scott, Mitra, Subhasish, Wong, H.-S. Philip, Howe, Roger T.

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 1012 KB

english, 2015

4

Free vibration of triply coupled centrifugally stiffened nonuniform beams, using a refined dynamic finite element method

M. Shavezipur, S.M. Hashemi

Journal:

Aerospace Science and Technology

Year:

2009

Language:

english

File:

PDF, 296 KB

english, 2009

5

Fabrication uncertainties and yield optimization in MEMS tunable capacitors

M. Shavezipur, K. Ponnambalam, A. Khajepour, S.M. Hashemi

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1.30 MB

english, 2008

6

Inline Measurement of Adhesion Force Using Electrostatic Actuation and Capacitive Readout

Shavezipur, M., Gou, W., Fisch, M., Carraro, C., Maboudian, R.

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 394 KB

english, 2012

7

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Nanoelectromechanical relays with decoupled electrode and suspension

Parsa, R., Shavezipur, M., Lee, W.S., Chong, S., Lee, D., Wong, H.-S. P., Maboudian, R., Howe, R.T.

Year:

2011

Language:

english

File:

PDF, 3.67 MB

english, 2011

8

Laterally Actuated Platinum-Coated Polysilicon NEM Relays

Parsa, Roozbeh, Lee, W, Shavezipur, Mohammad, Provine, J, Maboudian, Roya, Mitra, Subhasish, Wong, H, Howe, Roger

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 1.67 MB

english, 2013

9

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Dual-beam, six-terminal nanoelectromechanical relays

Harrison, K. L., Lee, W. S., Shavezipur, K., Provine, J., Mitra, S., Wong, H.-S. P., Howe, R. T.

Year:

2013

Language:

english

File:

PDF, 2.16 MB

english, 2013

10

3D Stretchable Arch Ribbon Array Fabricated via Grayscale Lithography

Pang, Yu, Shu, Yi, Shavezipur, Mohammad, Wang, Xuefeng, Mohammad, Mohammad Ali, Yang, Yi, Zhao, Haiming, Deng, Ningqin, Maboudian, Roya, Ren, Tian-Ling

Journal:

Scientific Reports

Year:

2016

Language:

english

File:

PDF, 1.43 MB

english, 2016

11

[ASME ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Quebec City, Quebec, Canada (Sunday 26 August 2018)] Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems - Temperature Compensation in MEMS Capacitive Pressure Sensors for Harsh Environment Applications

Suthar, Rahul Jitendrab, Shavezipur, Mohammad

Year:

2018

Language:

english

File:

PDF, 1.42 MB

english, 2018

12

[IEEE 2009 2nd Microsystems and Nanoelectronics Research Conference (MNRC 2009) - Ottawa, ON, Canada (2009.10.13-2009.10.14)] 2009 2nd Microsystems and Nanoelectronics Research Conference - A structurally multifunctional pressure-temperature sensor

Sohi, Ali Najafi, Shavezipur, Mohammad, Nieva, Patricia, Khajepour, Amir

Year:

2009

Language:

english

File:

PDF, 9.90 MB

english, 2009

13

Development of capacitive temperature sensors with high sensitivity using a multiuser polycrystalline silicon process

Othayq, Mazen M., Giganti, Nino, Shavezipur, Mohammad

Journal:

Microelectronic Engineering

Year:

2020

Language:

english

File:

PDF, 853 KB

english, 2020

14

Development of a triangular-plate MEMS tunable capacitor with linear capacitance–voltage response

M. Shavezipur, S.M. Hashemi, P. Nieva, A. Khajepour

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 547 KB

english, 2010

15

A probabilistic design optimization for MEMS tunable capacitors

M. Shavezipur, K. Ponnambalam, S.M. Hashemi, A. Khajepour

Journal:

Microelectronics Journal

Year:

2008

Language:

english

File:

PDF, 549 KB

english, 2008

16

A novel linearly tunable butterfly-shape MEMS capacitor

M. Shavezipur, A. Khajepour, S.M. Hashemi

Journal:

Microelectronics Journal

Year:

2008

Language:

english

File:

PDF, 684 KB

english, 2008

17

Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness

Shavezipur, M, Nieva, P, Hashemi, S M, Khajepour, A

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 1.44 MB

english, 2012

18

A finite element technique for accurate determination of interfacial adhesion force in MEMS using electrostatic actuation

Shavezipur, M, Li, G H, Laboriante, I, Gou, W J, Carraro, C, Maboudian, R

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 1.50 MB

english, 2011

19

Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance–voltage response and extended tuning range

Shavezipur, M, Nieva, P, Khajepour, A, Hashemi, S M

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 1.33 MB

english, 2010

20

[American Institute of Aeronautics and Astronautics 48th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference - Honolulu, Hawaii (23 April 2007 - 26 April 2007)] 48th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference - A Mesh Reduction Method (MRM) for the Free Vibration Analysis of Blades

Hashemi, Seyed-Mohammad, Shavezipur, Mohammad

Year:

2007

Language:

english

File:

PDF, 310 KB

english, 2007

21

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Laterally actuated nanoelectromechanical relays with compliant, low resistance contact

Shavezipur, M., Lee, W. S., Harrison, K. L., Provine, J., Mitra, S., Wong, H.-S. P., Howe, R. T.

Year:

2013

Language:

english

File:

PDF, 1.01 MB

english, 2013

22

Measurement of adhesion forces between polycrystalline silicon surfaces via a MEMS double-clamped beam test structure

Li, G H, Laboriante, I, Liu, F, Shavezipur, M, Bush, B, Carraro, C, Maboudian, R

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 1.11 MB

english, 2010

23

[IEEE 2008 1st Microsystems and Nanoelectronics Research Conference (MNRC 2008) - Ottawa, ON, Canada (2008.10.15-2008.10.15)] 2008 1st Microsystems and Nanoelectronics Research Conference - A MEMS capacitive, passively powered heart rate monitor: Design and analysis

Bassiachvili, Elena, Stewart, Robert, Shavezipur, Mohammad, Nieva, Patricia

Year:

2008

Language:

english

File:

PDF, 390 KB

english, 2008

24

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Measurement of adhesion force at elevated temperatures in MEMS using thermal-structural actuation

Shavezipur, M., Li, G.H., Gou, W., Carraro, C., Maboudian, R.

Year:

2011

Language:

english

File:

PDF, 5.84 MB

english, 2011

25

[IEEE 2008 1st Microsystems and Nanoelectronics Research Conference (MNRC 2008) - Ottawa, ON, Canada (2008.10.15-2008.10.15)] 2008 1st Microsystems and Nanoelectronics Research Conference - Eliminating the galvanic effect for microdevices fabricated with PolyMUMPs®

Syed, Abdullah, Mu, Luye, Shavezipur, Mohammad, Nieva, Patricia

Year:

2008

Language:

english

File:

PDF, 543 KB

english, 2008

26

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - In-line adhesion monitoring and the effects of process variations on adhesion in MEMS

Shavezipur, M., Gou, W., Carraro, C., Tian, Y., Maboudian, R., Gelmi, I., Campedelli, R., Azpeitia, M.

Year:

2013

Language:

english

File:

PDF, 625 KB

english, 2013

27

The application of structural nonlinearity in the development of linearly tunable MEMS capacitors

M. Shavezipur, A. Khajepour, S. M. Hashemi

Year:

2008

Language:

english

File:

PDF, 487 KB

english, 2008

28

Development of novel segmented-plate linearly tunable MEMS capacitors

M. Shavezipur, A. Khajepour, S. M. Hashemi

Year:

2008

Language:

english

File:

PDF, 630 KB

english, 2008

29

Prediction of growth of Pseudomonas fluorescens in milk during storage under fluctuating temperature

Lin, Hao, Shavezipur, Mohammad, Yousef, Ahmed, Maleky, Farnaz

Journal:

Journal of Dairy Science

Year:

2015

Language:

english

File:

PDF, 871 KB

english, 2015

30

[ASME ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Brooklyn, New York, USA (August 3–6, 2008)] Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems - A Novel Linear MEMS Capacitor With Triangular Electrodes and Nonlinear Structural Stiffness

Shavezipur, Mohammad, Hashemi, Seyed Mohammad, Khajepour, Amir

Year:

2008

Language:

english

File:

PDF, 223 KB

english, 2008

31

[ASME ASME 2006 International Mechanical Engineering Congress and Exposition - Chicago, Illinois, USA (November 5 – 10, 2006)] Microelectromechanical Systems - Sensitivity Analysis in Yield Optimization of MEMS Tunable Capacitors

Shavezipur, Mohammad, Ponnambalam, Kumaraswamy, Khajepour, Amir, Hashemi, Seyed Mohammad

Year:

2006

Language:

english

File:

PDF, 334 KB

english, 2006

32

Analysis of moisture diffusion mechanism in structured lipids using magnetic resonance imaging

Paluri, Sravanti, Shavezipur, Mohammed, Heldman, Dennis R., Maleky, Fatemeh

Journal:

Year:

2015

Language:

english

File:

PDF, 548 KB

english, 2015

33

Ethanol concentration of fermented broth by ohmic-assisted hydrodistillation

Gavahian, Mohsen, Farahnaky, Asgar, Shavezipur, Mohammad, Sastry, Sudhir

Journal:

Innovative Food Science & Emerging Technologies

Year:

2016

Language:

english

File:

PDF, 598 KB

english, 2016

34

SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII - Effects of actuation methods and temperature on adhesion force between polycrystalline silicon surfaces in MEMS

Shavezipur, M., Carraro, C., Maboudian, R., Ramesham, Rajeshuni, Shea, Herbert R.

Year:

2013

Language:

english

File:

PDF, 692 KB

english, 2013

35

[ASME ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Cleveland, Ohio, USA (Sunday 6 August 2017)] Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems - Three-Dimensional Biomimetic Biosensors for Food Safety Applications

Huffman, Brian, Mazrouei, Roya, Bevelheimer, Joseph, Shavezipur, Mohammad

Year:

2017

Language:

english

File:

PDF, 1.46 MB

english, 2017

36

Correction: Analysis of moisture diffusion mechanism in structured lipids using magnetic resonance imaging

Paluri, Sravanti, Shavezipur, Mohammed, Heldman, Dennis R., Maleky, Fatemeh

Journal:

Year:

2017

Language:

english

File:

PDF, 136 KB

english, 2017

37

[ASME ASME 2009 International Mechanical Engineering Congress and Exposition - Lake Buena Vista, Florida, USA (November 13–19, 2009)] Volume 12: Micro and Nano Systems, Parts A and B - Modeling of a Multifunctional Pressure-Temperature Sensor

Sohi, Ali Najafi, Shavezipur, Mohammad, Nieva, Patricia, Khajepour, Amir

Year:

2009

Language:

english

File:

PDF, 1.04 MB

english, 2009

38

[ASME ASME 2006 International Mechanical Engineering Congress and Exposition - Chicago, Illinois, USA (November 5 – 10, 2006)] Microelectromechanical Systems - Design and Modelling of Novel Linearly Tunable Capacitors

Shavezipur, Mohammad, Khajepour, Amir, Hashemi, Seyed Mohammad

Year:

2006

Language:

english

File:

PDF, 378 KB

english, 2006

39

Development of an impedance-based interdigitated biochemical sensor using a multiuser silicon process

Mazrouei, Roya, Huffman, Brian, Sumita, Minako, Shavezipur, Mohammad Ilinois

Journal:

Journal of Micromechanics and Microengineering

Year:

2019

Language:

english

File:

PDF, 908 KB

english, 2019

40

Development of circuit models for electrochemical impedance spectroscopy (EIS) responses of interdigitated MEMS biochemical sensors

Tolouei, Nadia E., Ghamari, Shima, Shavezipur, Mohammad

Journal:

Journal of Electroanalytical Chemistry

Year:

2020

File:

PDF, 2.88 MB

2020